客思特設(shè)備（丹東）有限公司

客思特設(shè)備（丹東）有限公司

SEC-Z512日本HORIBA進(jìn)口STEC氣體質(zhì)量流量計(jì)

Coastal Instruments 成立于1980年，是國(guó)內(nèi)專(zhuān)業(yè)的流量計(jì)服務(wù)商。致力于進(jìn)口質(zhì)量流量計(jì)、壓力傳感器等壓力測(cè)量器件的校準(zhǔn)、維修及*。其技術(shù)*、高可靠性及誠(chéng)信使其成為行業(yè)的，是專(zhuān)業(yè)的MFC技術(shù)服務(wù)商。

客思特設(shè)備（丹東）有限公司 專(zhuān)門(mén)經(jīng)營(yíng)進(jìn)口氣體質(zhì)量流量計(jì)銷(xiāo)售，全套校準(zhǔn)證書(shū)，一年質(zhì)保期。

本公司專(zhuān)業(yè)銷(xiāo)售質(zhì)量流量計(jì)近40年，具有豐富的銷(xiāo)售和售后服務(wù)經(jīng)驗(yàn)，我們有專(zhuān)業(yè)的服務(wù)團(tuán)隊(duì)和專(zhuān)業(yè)工程師對(duì)產(chǎn)品進(jìn)行跟蹤服務(wù)。
具體產(chǎn)品參數(shù)，價(jià)格請(qǐng)?jiān)儍r(jià)，請(qǐng)聯(lián)系鄒積坤經(jīng)理

本公司主要經(jīng)營(yíng)的品牌有：

HORIBA

MKS

BROOKS

UNIT

AERA

MKS

MYKROLIS

MILLIPORE

SAM

STEC

SEC-Z512日本HORIBA進(jìn)口STEC氣體質(zhì)量流量計(jì)

客思特設(shè)備（丹東）有限公司

always

striving to develop and manufacture environmentally sound products.

A reliable support system with an international network
Using a network that has branches throughout the world, HORIBA STEC s highly

skilled engineers offer complete support for all HORIBA STEC products.

HORIBA STEC quickly and reliably supplies equipment to its customers through its

three main bases: Kyoto, which acts as HORIBA STEC s headquarters; Aso, the

HORIBA Group s mass production factory, which features the latest in production

equipment; and two bases in the United States (CA, TX), which act as ultra-quick

suppliers.

* The new Aso factory was completed in October 2005.
The superior dependability you expect from HORIBA STEC. Industry

leader

HORIBA STEC, is a brand hailed by equipment manufacturers throughout the world,

one of many indications that HORIBA STEC consistently supplies high-quality,

highly dependable products that meet the toughest standards.

Introducing the remarkable ,

a break-through in mass flow control technology

The mass flow controller, is a key piece of semiconductor manufacturing equipment.

Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process.

HORIBA STEC, a company that has consistently introduced high-quality, highly functional products

to the demanding semiconductor manufacturing market,

and thereby grown its worldwide market share to over 30%*1, has recently developed a new mass flow controller,

one that breaks the mold completely and will change the future of mass flow control technology.

That new mass flow controller is the SEC-Z500X.

It provides all the mass flow functions customers need, including the flexibility to handle different gas types and flow volumes.

The customer him or herself can alter its specifications to suit changing needs*2.

The unit is also RoHS compliant, which makes it the perfect environmentally friendly tool for improving corporate value.

The highly functional, high added value ‘X’ is brimming with previously unknown charm.

The world is witnessing the birth of a mass flow controller that will change the future of the semiconductor industry.

*1 From VLSI’s 2005 Research Report.

*2 Multi-gas, multi-range functio

Multi-gas, multi-range solution
N2 100 SCCM

Ar 110 SCCM

B2H655 SCCM
Example:

SEC-Z500X MR.MG02

Example:

SEC-Z500X MR.MG04

N2 1000 SCCM N2 250 SCCM
Flow rate control range

20 to 1000 SCCM

Flow rate control range

5 to 250 SCCM

Suitable for multiple ranges
Freely change the full scale
Configuration software that allows the user to alter specifications on-site
The SEC-Z500X offers multi-gas, multi-range functionality, thanks to its

configuration software. This software makes it possible to select

MR/MG numbers simply by entering the type of gas being used and the

flow rate range, and also features a handy N2

gas conversion feature for flow rate

measurements using N2 gas during receipt

inspections. To ensure that the software is used

without error, HORIBA STEC offers software

operation seminars. For information on these

seminars, please contact your HORIBA STEC

representative.

Changing the full-scale flow rate
List of full-scale flow rates for different gases
Even when the same full-scale values are used, the MR/MG numbers

associated with the full-scale flow rate values for the calibration gas

may vary, due to variations in the thermal conductivity of the different

process gases. To increase flow rate calibration precision, HORIBA

STEC offers the following lineup of MR/MG numbers.

Suitable for multiple types of gas
Freely change types of gas

HORIBA STEC has made it possible for the user to change the type of

gas or full-scale flow rate on site. Our special Z500 configuration

software makes it possible to change these specifications at will. Best

of all, the changes can be made without removing the mass flow

controller from the gas panel or piping. This reduces the number of

spare mass flow controllers users need to store, and helps save both

time and money.

The customer can supply all the system components listed above, if desired, except for the software, which must

be provided by HORIBA STEC. Please consult your HORIBA STEC representative for more detailed specifications.

Name
Computer

Software

Communications converter

(serial)
Conversion adapter (CA-DP9RJ45)
RS232C cable

LAN cable

USB serial converter

Label printer

Notes
OS: Japanese or English, Windows® 2000 / XP / Vista

Configuration software

HORIBA STEC offers seminars detailing the use of the software.

RS-485

Communications converter to LAN cable

PC to communications converter

LAN cable for SEC-Z500X communications

Required for computers that do not have a serial port

Please consult your HORIBA STEC representative for further information

PC (Windows)

SEC-Z500

Configuration Software

Serial Converter

CA-DP9RJ45 Serial
RS232C Converter
cable

SC-EDH signal cable

RS485 LAN cable

RS232C cable

Printer

PAC-D2X or

similar power

supply

+15, -15 Volts DC

SEC-Z500X

3 – 10	—	—	—	—	—	R01
8 – 30	12 – 35	8 – 30	5 – 11	5 – 9	—	01
25 – 100	35 – 110	25 – 100	9 – 36	16 – 31	5 – 6	02
75 – 300	110 – 350	75 – 300	28 – 100	44 – 86	10 – 20	03
250 – 1000	350 – 1100	250 – 1000	90 – 350	150 – 280	34 – 67	04
750 – 3000	1100 – 3500	750 – 3000	260 – 1000	470 – 930	110 – 200	05
2500 – 10000	3500 – 11000	2500 – 10000	780 – 3100	1600 – 3100	360 – 700	06
—	—	R1.5
9 – 17	—	1.5
25 – 50	6 – 11	2.5
79 – 150	19 – 37	3.5
280 – 540	60 – 110	4.5
860 – 1700	190 – 370	5.5
10000 – 30000	10000 – 30000	10000 – 30000	—	—	—	07
30000 – 50000	30000 – 50000	30000 – 50000	—	—	—	08
—	—	6.5
SEC-Z51■X series
MR/MG number Gas type	N2	Ar	H2	SF6	HBr	WF6
SEC-Z52■X series

Minimum flow rate — maximum flow rate