技術數據
| 測徑儀型式 |
| XLS40/1500/B |
| XLS80/1500/B |
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| 量測區域 | (mm) | 40 |
| 80 |
| 可量測直徑 | (mm) | 0.06 - 38 |
| 0.75 - 78 |
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| 分辨率(可選擇) | (μm) | 10 / 1 / 0.1 / 0.01 | ||
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| 核心線性精度 | (μm) | ± 0.5 (1) |
| ± 1 (2) |
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| 線性精度(量測平面) (3) | (μm) | ± 0.5 |
| ± 1 |
| 重復性精度 (T=1s, ±2V) | (μm) | ± 0.07 |
| ± 0.2 |
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| 單點重復性精度(±2V) |
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| (μm) | ± 1.5 |
| ± 3.5 | |
| 光束接觸點 (s,l) (4) | (mm) | 0.06 x 0.1 |
| 0.4 x 0.2 |
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| 激光光點落差 | (mm) | ± 0.02 |
| ± 0.05 |
| 掃描頻率 | (Hz) | 1500 |
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| 掃描速度 | (m/s) | 300 |
| 588 |
| 熱膨脹系數 (5) | (μm/m°C) | - 11.5 |
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| 激光光源 |
| VLD (Visible Laser Diode); O = 650 nm | ||
