MKS真空計628.1TDF2B-S薄膜傳感器
深圳市天鉉真空技術(shù)有限公司供應(yīng)美國真空計流量計真空泵分子泵激光器

INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型標(biāo)準(zhǔn)真空計采用當(dāng)今市場上的數(shù)字皮拉尼技術(shù)。不銹鋼傳感器單元堅固耐用，結(jié)構(gòu)設(shè)計緊湊，適用于半導(dǎo)體系統(tǒng)和標(biāo)準(zhǔn)應(yīng)用，例如前級真空管。

益處

輕松一鍵調(diào)節(jié) ATM 和 HV
節(jié)省空間的堅固設(shè)計
鋁質(zhì)殼體
可在任意方向安裝
不銹鋼測量單元，帶金屬密封饋入裝置
便于集成的對數(shù)信號輸出
螺紋接頭，具有 10 巴過壓能力
250 °C 烘烤型
在腐蝕應(yīng)用中可選購鎳絲
陶瓷饋入裝置，適用于腐蝕性的應(yīng)用 (PSG510 & PSG512)
可選設(shè)定點
RoHS 合規(guī)

典型應(yīng)用

高真空電離真空計控制
前級真空壓力監(jiān)控
真空系統(tǒng)中的安全電路
高真空和低真空范圍內(nèi)的一般真空測量和控制

類型

PSG500 tungsten	PSG500-S tungsten, setpoints	PSG502-S nickel, setpoints	PSG510-S tungsten, setpoints, ceramic feedthroughs	PSG512-S nickel, setpoints, ceramic feedthroughs
測量原則		thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani
精度 (N2)
1 x 10-3… 100 毫巴	% of reading	±15%	±15%	±15%	±15%	±15%
5 x 10-4… 1 x 10-3 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
100 … 1000 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
可重復(fù)性（空氣）
1 x 10-3… 100 毫巴	% of reading	2%	2%	2%	2%	2%
輸出信號（測量信號）
電壓范圍	V	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3
測量范圍	V	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0
測量范圍（空氣、O2、CO、N2）	mbar	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000
設(shè)定點
設(shè)定點數(shù)量			2	2	2	2
設(shè)置范圍	mbar	?	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500
滯后	% of reading	?	10% above lower threshold	10% above lower threshold	10% above lower threshold	10% above lower threshold
繼電器觸點	V (dc) A (dc)	?	30	30	30	30
繼電器觸點：轉(zhuǎn)換時間	ms	?	<20>	<20>	<20>	<20>
電源電壓
真空計上	V (dc)	+14 …+30	+14 …+30	+14 …+30	+14 …+30	+14 …+30
波紋	V (p-p)	≤1	≤1	≤1	≤1	≤1
電壓與壓強		logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade
內(nèi)部容積
DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF	cm3 (in.3)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R 長管	cm3 (in.3)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)
1/8'' NPT，4 VCR，8 VCR，1/2'' 管	cm3 (in.3)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)
容許溫度
運行	°C	+5 … +60	+5 … +60	+5 … +60	+5 … +60	+5 … +60
真空連接 (1)	°C	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)
貯存	°C	-20 … +65	-20 … +65	-20 … +65	-20 … +65	-20 … +65
重量
DN 16 ISO-KF，7/16-20 UNF	g	80	80	80	80	80
DN 16 CF-R，4 VCR	g	100	100	100	100	100
1/8'' NPT，1/2'' 管	g	70	70	70	70	70
8 VCR，DN 16 ISO-KF 長管	g	130	130	130	130	130
DN 16 CF-R 長管	g	140	140	140	140	140
錯誤信號	V	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)
輸出電阻	?	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7
*小負(fù)載電阻	k?	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof
反應(yīng)時間	ms	80	80	80	80	80
真空計識別	k?	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common
調(diào)整		one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment
電流消耗	mA	<500 (max.="" starting="" current)="">	<500 (max.="" starting="" current)="">	<500 (max.="" starting="" current)="">	<500 (max.="" starting="" current)="">	<500 (max.="" starting="" current)="">
功耗	W	≤1	≤1	≤1	≤1	≤1
電氣連接		FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male
傳感器電纜		8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding
電纜長度	m	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)
暴露于真空的材料		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
單絲		W	W	Ni	W	Ni
容許壓力	bar (absolute)	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases
安裝定位		any	any	any	any	any
保護(hù)等級		IP40	IP40	IP40	IP40	IP40