1756-DNB

1756-DNB

1756-DNB

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FOXBORO
Triconex
SIEMENS
Schneider
MOTOROLA
XYCOM
Ovation
Rexroth Indramat

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企業服務

Genmark 2sp059781, Prealigner, firmware version GP2S-3.21, sp1982-2795

Schumacher 1491-1014B refill controller Transfill 2, DSCE for Trans LC

2110-320626-11 SIC insulated liner looks

Schumacher 1491-1500N bulk Refill controller for Bubbler

LAM 853-015130-002-?P RF match,

2  VAT PM-5 Adaptive pressure controller LAM 796-093088-004 REV.H

Berkeley Process Controls, MWTX-8-MNET, Controller, SECS, 8-Axis, BAM, GEM

Vacuum chamber with 2 spare clamp rings, aluminum

AMAT 0190-00398 ASTeX ARX-X491-P 3Kw Microwave control module ARX-X491

4 Stec MFC, SEC-4600MC-SUC and SEC-4600R, 100 SLM, N2 gas.

Novellus 12-01163-00 Ceramic Ring

MikroPrecision Automation XY stage RS-O2-CFM125

 HVA 21210-0256Z-002 Novellus 19-147080-00, 2.5" High temp gate vale

Ametek Dycor CG1000 RTP oxygen analyzer

Electro Scientific Ind ESI 61322 B.P. High Voltage Power supply

Lintec 4TK10CGN-A Torque Motor, AC, 10W, 100V, 12uF

2 Omron C40 K SYSMAC, C40K-CDR-D programmable controller, Novellus 0125-150619

Comdel MatchPro CPMX-3000 Matching Network

5 MKS baratron 124A-11848, 2000 Torr Range, with calibration sheet.

5 AMAT 0021-36300 manifold, output DXZ chamber, repaired, price for 5

Lot of 2, MKS 631B-27698, Capacitance manometer, 50 Torr

Digital dynamics 27-10157-00 I/O controller IOC ver 4.1

5 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min, S107646

Thermawave 14-006060 PCB AT, A/D Analog to Digital Converter PCB

7 Berkeley Process controls MIO-A-4-602 ANALOG CURRENT, 4 point input

6 UNIT 1660 MFC, UFC-1660, O2, Ar, Cl2, BCl3, C2F6 different gas range.

Novellus 02-103970-00 ASSY,MOD CONT,P166/64 controller

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

6  SVG 913999-001, gas manifolds with 2 Swagelok 6LV-D4D333P-AA valves each

3 Bayside GM090-C2A1B-001?, 971041, Gear motors

5 Horiba Stec MFC Injection valve Metal Seat UCV Injector IV-2410AV

5 Stec MFC SEC-4400, O2, CO2, He, Ar, Cl2, different gas range.

6 AMAT 0020-24914, Endura 5500, Cover Ring SST 200mm, PVD Looks very clean

 Brooks 002-5870-05 Electronics module, I/O assy 002-4674-09

 Brooks 149345, 27-334953-00 Robot Electronic module, AQR7, CIP,

 MKS T3BIA Throttle valve with KF40 flanges, T3BIA-28147, Novellus 60-339713

 Brooks 002-5870-06 Robot control module assy, Novellus 27-123450-00

4 Berkeley process controls ASM-81-A-0/A-00?-LB/10/6:1, 950614 Motors, 5000 RPM

Neslab Merlin 25 Recirculating chillier, working

Novellus 60-114757-00 VAT Monovalve, Alum, Heated 02109-BA24-AMU 1/0004

Novellus 60-10129-00 VAT 03009-NA24-1001 wide mnt. Rectangular insert gate valve

5  Bayside NR23S-010-032 Precision gearhead, 10:1 ratio

VAT 02009-BE24-0001 Rectangular Gate Valve, PM, ISO, F02-60492

3 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sheet.

7 STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2,

7  Furon saint gobain 1102691 UPRM-144-M with gauge port, teflon

AMAT 0190-00398 AGL D13450 Microwave control module 3Kw

3  Stec SEC-4400 MFC, SEC-4400M, WF6 gas, 10 SCCM flow rate, S9943, S5514

Novellus 60-114757-00 VAT monovalve aluminum heated

TWO MKS Throttle valve controller 651D-15413

Novellus 02-105005-00 ASSY,MC,P166,W/?8 RS232 controller

Neslab chiller HX+100W/C, 24376-01 REV 0.5, CoolFlow refrigerated recirculator

2  Bayside GR115-K1E1B-001?, 0150-111964, Gear motors, 100:1 ratio, 10A

EDWARDS DP80 Dry Vacuum Pump, , as is

2 AMAT 0010-09341 CVD wafer lift assembly, AMAT 0010-10033, very clean

AMAT 0010-76175 Throttle valve, CVD

 AMAT 0190-09348 P5000 CVD Chamber susceptor assy. 200mm, with certificate

Brooks Automation 129973 Series 8 Controller, 100-240 VAC, 50/60 Hz

Lot of 7  Power one HCC15-3-A 12VDC or 15VDC power supplies

ENI ACG-3 RF Power Generator

5 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC

5 UNIT 1660 MFC, UFC-1660, CL2, N2, SF6, Ar, C2HF5, different gas range.

3 MKS baratron 124A-11848, 2000 TORR, with calibration sheet, repaired.

140  Thompson 182018 Super8 Cartridge ball Bushing Linear Bearings

ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832

300 LM76 L408-6 Ceramic Coated Linear Motion Bearings

ENI RF Generator OEM-12A, 1250W at 13.56 MHz

Advanced Energy PDW 600 RF Generator, AE 3156014 Lam # 853-15516-003

ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1

HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72

XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72

Lot of 4 Infranor BAA-220T20A  Servo Controller

AMETEK Dycor RGA Q100M head, cable, Osaka TGC51CA turbo, TC61 controller

Lot of 2 Infranor SMTAS 220/17 657170  Brushless servo motor amplier

Lot of 4 Infranor SMTAS 220/17 657169 Brushless servo motor amplier SMTAS 220/17

Brooks 10080-0 Wafer aligner 4900-0006-089

4  Siemens GF01ED65 I-T-E Ground fault sensor and relay kit

307 vacuum gauge controller granville phillips, lots of 4

10  LAMBDA LFS39-12, Power supply, 12VDC Power supplies

5 Unit MFC 1660, UFC-1660 N2 100 SCCM,Ar 400 SCCM,CHF3 50 SCCM, CH2F2, （CH30） 3B

5 Unit MFC, UFC-1660, （CH3O）3B, Ar, N2, C4F8, HBr, Different gas range.

Novellus 03-299425-00 Backside Wafer handling Interface xPRS PCB. FAB 26-299425

Genmark 400298338 Robot, For parts

 Kollmorgan MT1506B1-E2C1 Goldline servo motor, 968601, Novellus

4 MKS baratron 124A-11848, 2000 Torr Range, with calibration sheet. S249A

5 Unit 1660 MFC UFC-1660 C4F8 20 sccm, SF6 50 sccm,CF4 50 sccm, O2 20 sccm, Ar

4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 3.0 g/min and 4.0 g/min, S0403

4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min, S90901, S00004

SMC ThermoCooler Chiller HRGC002-AN-T

ENI OEM-1250-02 RF generator 3 phase 5 wire, 1250 Watts

 Parker 6K4, 0125-112454, 4 Axis servo stepper motor drive controller, Manual

 Parker GT6, 0125-112453, Gemini stepper motor drive controller

3 MKS baratron 127AA-00001E, 1 torr, sealed bag

Novellus 27-263706-00, SIOC, I/O module, Ver 4.72, PNL

10  Perlast 22-291392-00 Oring, 2-279, G67P, 329.80 x 3.53

CTI Helix 8129948G001 Cryo On board turboplus cryopump regen controller

AMAT 0021-01602 Manifold, input water NI PL, TI - XZ

2 AMAT 0010-76175 throttle valve, dual spring, cluster, TEOS, rebuilt

Seiko Seiki STPH1301L1B Turbo controller, STP control unit, with data sheet

Berkeley Process Control USA2-22-35 Multi-Axis Universal Servo Amplifier

Seiko Seiki STP-H1301L1B Turbo pump controller, 1K L/S, 2 PH, 796-360188-001

VAT 600SP-99LB-0001?, Throttling gate valve integrated controller pendulum

Aerotech ES13713-3 UNIDEX100 multitasking motion controller, cables and software

Affinity Chiller PNE-H20L-ED36CB?CO

2 Dainippon SEPC-0065 TU controller, 2-VC-13234

Advanced energy 2026-000-D, ASM LDM PLASMA Generator

Novellus 30-121470-02 Ring, electromagnet assembly

2 Leybold TurboTronik NT 340M, 340 M/I turbo pump controller

Lot of 2  Novellus 02-120820-00 Porter Assembly, DEGAS, Integrated LDS,

Techware PAL-00386, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

Techware PAL-00525, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

Techware PAL-00356, Cluster module controller 16 Dig I/O, 48 AI/O, 32 Relay I/O

Brooks CLMC-JA, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

2 AMAT 0020-30629, chucks, looks , very clean

BOC Edward Seiko Seiki STP-H2002C, STP turbo pump control unit, STPH2002C

Ebara ET300W, Turbo pump controller, AET08-4391, very clean, 303W REM01 PWM-15M

Berkeley Process Controls USA4-35-70, 950607, Bam controllers USA4-35-70

Equipe ESC 210 Robot Controller

AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match

 Berkeley process USA-2-22-35, 950608, Multi axis servo amplifiers BAM

2  Horiba Stec MFC, SEC-7440M, 5 SLM, O2 gas, mass flow controller

3 Motorla MVME 147-012 PCB, VME module 84-W8964B01B

Nikon objective lens CF Plan 5X/0.13 TI

2  Brooks 017-0344-01, End effector, Robot blade, fiber optics, vector

AMAT 0010-09750 RF match, CVD, P5000, module mfg.3kv, 13.56 Mhz

8  Tylan FC-261 N2, H2, O2

10 Brooks handler calibration wafer test, 200mm, semitool 90006-11,

AVIZA 604387-03 Heated manifold TEA SAT

Nordson 1065804A 6 kW Microwave Lamp Head UV cure, Novellus 63-285050-00

MRC RF matching network A118144 For MRC Eclipse Star tool

Berkeley Process Controls TS-3200-BR Monitor IPEC Speedfam Novellus 966041

 MKS 655AD2N Pressure controller, manual MKS 600

Kinetics Thermal systems RC152ZLAM Chiller,

ASTEX applied science ABX-X355 0037 1873 SA, RF generator controller, PCB board

2  AMAT 0040-06896 TXZ Chamber CVD Lid Plates

2 AMAT 0010-09180 CVD CHAMBER WAFER LIFT ASSEMBLY

Lot of 2 Leybold NT 341 M , Turbotronic turbo pump controller

1D10-102521-12, Shield, Depo, Upper-Y, looks /ceramic coated, very clean

2 LAM 716-011036-001 Ring Filler, orifice, alumnia

3 MKS baratron 124A-11848, 2000 TORR, S 8263A

6 STEC MFC SEC-4400M, CL2, O2, SiF4,

6 STEC MFC SEC-4400M, NH3, CF4, CHF3,

5 IPEC Speedfam Novellus 952363, Entegris Q4000 Ball valve

TREK 684-1, 6 phase ESC Power supply, Novellus R19-137359-00

4  Linear actuator 400MM rail two long NP105, 95086-52

2  Novellus 94-34505-60 PCB board, I/O genus, 1569-04

Ipec Speedfam Novellus 959084 Lot of 2 Brushless Servomotors

Berkeley Process Controls ASM121-A-0/B-22?-NB/10, AC Brushless Servo Motor

2 AMAT 0190-35791 MUXADIO-001 Seriplex multiplexed ADIO boards

2 Kollmorgen MT1506B1-E2C1 Servomotor, goldline series, Ipec novvelus 968601

Lot of 7  in box, OPTO 22 G4RD remote digital 16 channel brainboard, Mistic

SMC XGT310-30-1A-X2?, Actuator, L-motion gate valve, looks rebuilt, sell as

Affinity Chiller  FWA-032K-DD01CA?M1

VAT 14038-PE24-AIU1?/0012 HV Gate valve, 14038-PE24-AIU1

Parker 6K4, 0125-112454, 4 Axis servo stepper motor drive controller

Brooks 002-5860-01, Card, Theta Driver, Brooks, ATR7, Novellus 27-155081-00

VAT 20040-UE24-ABD2?, Valve, VAT, 6"CF, EXT Body, Novellus R60-154308-00

AMAT 0020-10520, 125mm, pedestal thick

7  Todd products SC24-11C, power supplies, 115/230VAC 6A/3A w/ paper work

 Novellus 150-000-057, 950827 Drive assy w ASM81-B & Brecoflex T10/980 belt

Brooks Module Controller 002-5870-05, I/O Assembly 002-4674-09

SVG 879-0262-001 Shutter interlock control PCB 859-0727-010E

AMAT 0010-00006 RF RACK Control panel, back mount RF generator rack

ASTeX ABX-X348 ETO driver board water cooled

4  AMAT 3700-02105 Chemraz SC513, 10.484 x .139

 TEC ASM 000-71002700-00?, PCB, TEC 68356 D 45877

Advanced Motion Controls 30A20-ACT Brush Type PWM Servo Amplifier,  in Box

6  Fluorosilicone 19.33 x 1.39 Oring, Blue, 70, 22-373624-00

ENI LPG-6 pwer supply RF generator, output impedence LPG-6T ENI

PCB Board OPTO22 LC4 001836L 94V-0, OPTO 22 EX2 001840D

IPEC 2850-739459, GENMARK S08R.11 Wafer transfer robot controller