LRVP + Root's V.P. ( Max.: 3 Torr )
Operating : | Max.5 Torr |
助力型真空系統 CMW-2
Operating : | Max.1 Torr |

助力型真空系統 CMW-3
LRVP + Ejector + Root's V.P. + Root's V.P. ( Max.: 0.03 Torr )
Operating : | Max.0.1 Torr |
LRVP + Root's V.P. ( Max.: 3 Torr )
Operating : | Max.5 Torr |
助力型真空系統 CMW-2
Operating : | Max.1 Torr |

助力型真空系統 CMW-3
LRVP + Ejector + Root's V.P. + Root's V.P. ( Max.: 0.03 Torr )
Operating : | Max.0.1 Torr |
LRVP + Root's V.P. ( Max.: 3 Torr )
Operating : | Max.5 Torr |
助力型真空系統 CMW-2
Operating : | Max.1 Torr |

助力型真空系統 CMW-3
LRVP + Ejector + Root's V.P. + Root's V.P. ( Max.: 0.03 Torr )
Operating : | Max.0.1 Torr |