型號(hào)描述
型號(hào) 8715 是一臺(tái)用于調(diào)節(jié)侵蝕性氣體質(zhì)量流量的裝置，它需要一個(gè)與介質(zhì)相分離的傳感器。在數(shù)字的電子調(diào)節(jié)設(shè)備中，會(huì)將傳感器提供的實(shí)際值與規(guī)定的額定值進(jìn)行比較；存在調(diào)節(jié)偏差時(shí)，會(huì)通過一種 PI 調(diào)節(jié)算法對發(fā)送到比例閥上的調(diào)節(jié)參數(shù)進(jìn)行修改。這樣一來，就可以將質(zhì)量流量保持在一個(gè)確定的數(shù)值上，或使其遵循規(guī)定的曲線輪廓，而不會(huì)受到壓力波動(dòng)或設(shè)備中其他變化的影響。 可針對兩種不同的氣體對型號(hào) 8715 進(jìn)行校準(zhǔn)，用戶可在兩者之間進(jìn)行轉(zhuǎn)換。一個(gè)直動(dòng)式比例閥作為調(diào)節(jié)元件，確保了高反應(yīng)靈敏度和裝置良好的調(diào)節(jié)特性。通過數(shù)字方式與更高一級的設(shè)備進(jìn)行通訊，這樣一來，就可以省去額外的 D/A 轉(zhuǎn)換。
1）采用毛細(xì)管技術(shù)的旁通儀器，適合額定流量范圍 5 mlN/min 至 15 lN/min
2）適合侵蝕性氣體
3）緊湊型版本和數(shù)字通訊
Type Description
The mass flow controller (MFC) type 8715 is especially suited for regulating the mass flow of aggressive gases, which need a sensor which is not in direct contact with the gas. The thermal capillary sensor reaches fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8715 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed.
1）Nominal flow ranges from 0.005 lN/min to 15 lN/min
2）High accuracy and repeatability
3）Applicable for aggressive gases
4）Digital communication via RS485
氣體質(zhì)量流量控制器部分訂貨號(hào)如下：
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