性能
流量范圍-滿量程容量
.003 - 2500 slpm
精度
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20- FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20- FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
重復性
0.20% SP
線性
Included in accuracy
響應時間-常閉
0.003 - 100 slpm: <1 second
100 - 2500 slpm: <3 seconds
多氣體多量程
Standard
大壓力
.003-200 slpm: 1500 psi/103 bar
100 - 2500 slpm: 1000 psi/70 bar
Optional 4500 psi/310 bar on 50 slpm max device
控制范圍
1-50 slpm: 100:1 Turndown for F.S.
50-2500 lpm: 50:1 Turndown for F.S.
零點穩定性
< 0.2% F.S. per year
溫度系數
Zero: <0.05% of F.S per oC
Span: <0.1% of S.P. per oC
壓力系數
0.03% per psi (0-200 psi N2)
靈敏度
<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
等級
大溫度
65oC
壓差范圍
Controllers
.003 - 50 lpm: 5 psi / 0.35 bar
50 - 100 lpm: 10 psi / 0.69 bar
500 lpm: 7.5 psi / 0.52 bar
1000 lpm: 14.5 psi / 1.00 bar
2500 lpm: 35.0 psi / 2.41 bar
漏率
1x10-9 atm cc/sec He
機械
密封材料
Elastomer Seal
接液材料
316L Stainless Steel
High Alloy Stainless Steel
Viton® Fluoroelastomers
Buna-N
Kalrez®
Teflon®/Kalrez®
EPDM
閥門
Normally Closed
Normally Open
Meter (no valve)
診斷
診斷能力
Available
狀態燈
MFC Health, Network Status
報警
Sensor Output
Control Valve Output
Over Temperature
Power Surge/Sag
Network Interruption
診斷/服務端口
RS485 via 2.5mm jack
電氣
模擬通訊
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
數字通訊
DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
電氣連接
DeviceNet™: 1xM12 with threaded coupling nut (B)
EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45
Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
電源-功耗
Analog / Profibus® / RS-485
Valve Orifice > 0.032": 8 Watts
Valve Orifice ≤ 0.032": 5 Watts
Without Valve: 2 Watts
DeviceNet™ / EtherNet/IP™
Valve Orifice > 0.032": 10 Watts
Valve Orifice ≤ 0.032": 7 Watts
Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)
EtherCAT®
Valve Orifice > 0.032": 8.5 Watts
Valve Orifice ≤ 0.032": 5.5 Watts
Without Valve: 2.5 Watts
承諾
認證和批準
ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU
UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
ATEX: II 3 G Ex nA IIC T4 Gc
IECEx: II 3 G Ex nA IIC T4 Gc
KOSHA: Ex nA IIC T4
符合環保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
大小
Medium
